Comment svgcoat2 SNF 2007-09-04 11:51:59: Disp2 (Arm prgm4) long

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Sep 4 11:52:00 PDT 2007


Arm program 4 dispense takes much longer than usual to get 220-3 resist on wafer. Dispense happens twice (once with line in 'home' position, once over wafer)? GS aware of issue.




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