Problem svgcoat2 SNF 2007-09-04 12:11:21: 220-3 Resist Issues at center

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Sep 4 12:11:22 PDT 2007


Light dime-sized swirl (not comet) in center of wafer on 2/4 test wafers.




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