Problem svgcoat2 SNF 2007-09-07 15:13:40: error: chuck not centere

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Sep 7 16:44:58 PDT 2007


Did not see any mis-positioning of wafers(front to back). Possibly the wafers had resist on the edges and were getting stuck on the belts. When the carriage would open the wafers would be pulled and cause misposition on the HPO. Cleaned the HPO carriage belts. There was a bake plate vacuum fault. Did hot plate pin calibration to improve timing. Also cleaned the hotplate thoroughly. Ran ~15 wafers with no vacuum break error. We will need to replace the digital vacuum sensor. The sensor is reading in mm/hg instead of inches/hg. Cannot get into setup because the small buttons are stuck. Track is OK otherwise.    GS




More information about the svgcoat2-pcs mailing list