Problem svgcoat2 SNF 2007-09-20 00:35:49: dispense 3 not work

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 20 07:16:13 PDT 2007


checked and tested dispense # 3 , Purged Line, Cycled wafers
Dispense system working Fine , no problem found, Operator
Needs to be trained again??? 




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