Problem svgcoat2 SNF 2007-09-25 12:43:17: bad PR spin.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 25 13:24:05 PDT 2007


Someone replaced the resist bottle and didnt purged the line, 
sometimes running a couple of dummies doesnt help to 
get rid of the air gap in the line because the quantity of resist 
for every wafers es very small, purged line , cycled wafers, ok to use. 




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