From rmurthy at snf.stanford.edu Wed Apr 2 18:33:05 2008 From: rmurthy at snf.stanford.edu (rmurthy at snf.stanford.edu) Date: Wed, 2 Apr 2008 18:33:05 -0700 Subject: Problem svgcoat2 SNF 2008-04-02 18:33:04: PR on vapour prime track Message-ID: From vilanova at snf.stanford.edu Thu Apr 3 07:23:37 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Apr 2008 07:23:37 -0700 Subject: Problem svgcoat2 SNF 2008-04-02 18:33:04: PR on vapour prime track Message-ID: I cleaned ther hotplates. From mrlin at snf.stanford.edu Thu Apr 3 20:03:51 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 3 Apr 2008 20:03:51 -0700 Subject: Comment svgcoat2 SNF 2008-04-03 20:03:49: air bubble Message-ID: reoccurring air bubble in disp "1" From vilanova at snf.stanford.edu Fri Apr 4 07:29:33 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:29:33 -0700 Subject: Comment svgcoat2 SNF 2008-04-03 20:03:49: air bubble Message-ID: cleaned catch cup dispense hose,,purged line Cycled wafers, no more bubbles, wafers uniformity looks good. From gsosa at snf.stanford.edu Fri Apr 11 16:15:41 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Apr 2008 16:15:41 -0700 Subject: Shutdown svgcoat2 SNF 2008-04-11 16:15:41: Wafer transfer problems Message-ID: Wafer skipping the coat process sometimes. From gsosa at snf.stanford.edu Fri Apr 11 17:27:29 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Apr 2008 17:27:29 -0700 Subject: Comment svgcoat2 SNF 2008-04-11 17:27:29: Tool Update 4/11 Message-ID: The track is still down. Swapped the CPU board between stations. Now dispense arm does not go to lowered position. Possible configuration error during PC board swap. Will continue troubleshooting on Monday. From gsosa at snf.stanford.edu Mon Apr 14 16:01:02 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Apr 2008 16:01:02 -0700 Subject: Shutdown svgcoat2 SNF 2008-04-11 16:15:41: Wafer transfer problems Message-ID: Swapped CPU and I/O boards with no change. Troubleshot and finally determined that there was a very brief vacuum fluctuation. Enough of a fluctuation to drop below the sensor threshhold but not long enough to generate an error. Most likely due to the feedback communication with the system/recipe manager. Slightly reduced the vacuum setpoint to contain the problem for now. Will follow up on problem with AIO. Checked and centered all nozzles. Checked 2mm EBR width. Cycled many wafers through the tool- All OK. From gsosa at snf.stanford.edu Mon Apr 14 16:01:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Apr 2008 16:01:30 -0700 Subject: Comment svgcoat2 SNF 2008-04-11 17:27:29: Tool Update 4/11 Message-ID: Swapped CPU and I/O boards with no change. Troubleshot and finally determined that there was a very brief vacuum fluctuation. Enough of a fluctuation to drop below the sensor threshhold but not long enough to generate an error. Most likely due to the feedback communication with the system/recipe manager. Slightly reduced the vacuum setpoint to contain the problem for now. Will follow up on problem with AIO. Checked and centered all nozzles. Checked 2mm EBR width. Cycled many wafers through the tool- All OK. From kattsai at snf.stanford.edu Thu Apr 17 17:21:00 2008 From: kattsai at snf.stanford.edu (kattsai at snf.stanford.edu) Date: Thu, 17 Apr 2008 17:21:00 -0700 Subject: Problem svgcoat2 SNF 2008-04-17 17:21:00: receiver station won't move up Message-ID: From vilanova at snf.stanford.edu Fri Apr 18 07:37:01 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Apr 2008 07:37:01 -0700 Subject: Problem svgcoat2 SNF 2008-04-17 17:21:00: receiver station won't move up Message-ID: checked and test receive indexer, cycled wafers, indexer working Fine, ok to use. From mrlin at snf.stanford.edu Fri Apr 18 13:49:30 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 18 Apr 2008 13:49:30 -0700 Subject: Problem svgcoat2 SNF 2008-04-18 13:49:29: Week of April 14, Coater Quals Message-ID: -3612 1um, 1.6um, 3.0um: streaky, unsmooth edge bead -3612 1um: occasional but severe acetone drops in center (2 out of 10 wafers) From gsosa at snf.stanford.edu Fri Apr 18 16:03:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Apr 2008 16:03:14 -0700 Subject: Problem svgcoat2 SNF 2008-04-18 13:49:29: Week of April 14, Coater Quals Message-ID: Checked and cleaned nozzles and purged resist lines. Checked and adjusted 3612 suckback. Adjusted top EBR flow. From munehiro at snf.stanford.edu Mon Apr 21 09:48:34 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Mon, 21 Apr 2008 09:48:34 -0700 Subject: Problem svgcoat2 SNF 2008-04-21 09:48:34: PC freeze Message-ID: From vilanova at snf.stanford.edu Mon Apr 21 11:35:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Apr 2008 11:35:24 -0700 Subject: Problem svgcoat2 SNF 2008-04-21 09:48:34: PC freeze Message-ID: I re initialized PC, system ok now. From mrlin at snf.stanford.edu Mon Apr 21 15:41:22 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 21 Apr 2008 15:41:22 -0700 Subject: Comment svgcoat2 SNF 2008-04-21 15:41:21: SVG2 Coater Quals, Week of 4/20 Message-ID: all good. From mrlin at snf.stanford.edu Mon Apr 28 18:36:20 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 28 Apr 2008 18:36:20 -0700 Subject: Comment svgcoat2 SNF 2008-04-28 18:36:19: SVG 2 Quals, Week of 4/27 Message-ID: 1um 3612: streaky edgebead (edge only, wafer OK) 1.6um 3612: good 3.0um SPR-220-3: acceptable (slight nonuniformity) From wanki at snf.stanford.edu Tue Apr 29 01:41:37 2008 From: wanki at snf.stanford.edu (wanki at snf.stanford.edu) Date: Tue, 29 Apr 2008 01:41:37 -0700 Subject: Comment svgcoat2 SNF 2008-04-29 01:41:36: SVG coater2 Message-ID: #8 1.6um 3612 with vp : thickness is not uniform From vilanova at snf.stanford.edu Wed Apr 30 07:54:10 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Apr 2008 07:54:10 -0700 Subject: Comment svgcoat2 SNF 2008-04-29 01:41:36: SVG coater2 Message-ID: program # 8 thickness is not uniform??????? maybe user measnt to say the dispense, I cleaned the dispense hose, ran a few wafers and dispense looks good ready to use.