Comment svgcoat2 SNF 2008-04-11 17:27:29: Tool Update 4/11

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 14 16:01:30 PDT 2008


Swapped CPU and I/O boards with no change. Troubleshot and finally determined that there was a very brief vacuum fluctuation. Enough of a fluctuation to drop below the sensor threshhold but not long enough to generate an error. Most likely due to the feedback communication with the system/recipe manager. Slightly reduced the vacuum setpoint to contain the problem for now. Will follow up on problem with AIO. Checked and centered all nozzles. Checked 2mm EBR width. Cycled many wafers through the tool- All OK.  




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