Problem svgcoat2 SNF 2008-04-18 13:49:29: Week of April 14, Coater Quals

mrlin at snf.stanford.edu mrlin at snf.stanford.edu
Fri Apr 18 13:49:30 PDT 2008


-3612 1um, 1.6um, 3.0um: streaky, unsmooth edge bead
-3612 1um: occasional but severe acetone drops in center (2 out of 10 wafers)




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