Comment svgcoat2 SNF 2008-04-28 18:36:19: SVG 2 Quals, Week of 4/27

mrlin at snf.stanford.edu mrlin at snf.stanford.edu
Mon Apr 28 18:36:20 PDT 2008


1um 3612: streaky edgebead (edge only, wafer OK)
1.6um 3612: good
3.0um SPR-220-3: acceptable (slight nonuniformity)




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