Problem svgcoat2 SNF 2008-08-05 09:52:22: coater head does not lift up
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Tue Aug 5 10:35:25 PDT 2008
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Problem svgcoat2 SNF 2008-08-05 09:52:22: coater head does not lift up
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Comment svgcoat2 SNF 2008-08-06 14:05:09: cleaned HMDS hotplate.
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Cycled wafers , system ok to use.
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Problem svgcoat2 SNF 2008-08-05 09:52:22: coater head does not lift up
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Comment svgcoat2 SNF 2008-08-06 14:05:09: cleaned HMDS hotplate.
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