Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR
lwchang at snf.stanford.edu
lwchang at snf.stanford.edu
Thu Aug 7 13:04:16 PDT 2008
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Problem svgcoat2 SNF 2008-08-07 13:00:29: HP track didn't send the last wafer to the cooling station
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Problem svgcoat2 SNF 2008-08-07 18:05:55: wafer gets stuck
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