Problem svgcoat2 SNF 2008-08-07 18:05:55: wafer gets stuck

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Aug 7 18:05:55 PDT 2008


Mary c. called me and wafers get stuck on the hot plate. Pins will not go down and system will go to error and wafer that is waiting to go to spin looses vac. and system error .
I resert the system twice and watched it happen twice get the wafers off remeber which one did not get bake and all of that.
Mary tells me that happend yesterday as well.




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