Problem svgcoat2 SNF 2008-08-07 18:05:55: wafer gets stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 8 14:46:13 PDT 2008


Tested track operation out by cycling 50 wafers through the tool . 25 wafers were with a simulated standard recipe( everything except photoresist dispensing) . All systems checked out OK. Could not duplicate problems at bake plate. 




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