Problem svgcoat2 SNF 2008-08-08 21:34:41: Wafer stuck spinning, wouldn't move on track

johana at snf.stanford.edu johana at snf.stanford.edu
Fri Aug 8 21:34:41 PDT 2008


System rebooted. We turned the power on and off and it didn't resolve the problem. Mary Calarrudo told me to shut it down because it stopped working correctly. It has apparently had a problem for days, reported to Mahnaz and John Shott.




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