Problem svgcoat2 SNF 2008-08-09 16:44:56: Handling Questions

emyers at snf.stanford.edu emyers at snf.stanford.edu
Sat Aug 9 16:44:56 PDT 2008


Lab member reported wafer staying on spin chuck.  It was gone when I arrived.  I ran two dummies without handling problems.  I did not verify quality of coating.  Will add this yellow message, just so people will be aware prior problems.




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