Problem svgcoat2 SNF 2008-08-09 16:44:56: Handling Questions

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 11 13:27:23 PDT 2008


Cycled 50 dummy wafers through the tool. Could not duplicate the problem. Will continue to cycle the tool daily and will  try to simulate possible failure modes to recreate the problem.




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