Shutdown svgcoat2 SNF 2008-08-12 17:25:37:

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Aug 12 17:25:37 PDT 2008


I was called in by a student. the wafer was in the spin cup spinnning, i had the spin stop on the panel but it would not stop and then the arm start shaking and going back and forth and sprayed EBR all over . I was afraid that the chuck will come up and hit the arm. the system really needs HELP. Time is 5:25 now.




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