Problem svgcoat2 SNF 2008-08-20 10:07:07: rough EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 21 11:18:17 PDT 2008


replaced empty Resist bottle purge line, cycled wafers,
 adjusted EBR air pressure and cycled more wafers I dont 
see the rough EBR but I will run more wafers later to make 
sure the EBR system is stable. 




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