From vilanova at snf.stanford.edu Mon Dec 1 08:02:10 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Dec 2008 08:02:10 -0800 Subject: Comment svgcoat2 SNF 2008-11-27 11:01:50: wafer "unstuck" Message-ID: Cleared, Cleaned catch cup , cycled wafers, ok to use, From piyushv at snf.stanford.edu Tue Dec 2 20:57:27 2008 From: piyushv at snf.stanford.edu (piyushv at snf.stanford.edu) Date: Tue, 2 Dec 2008 20:57:27 -0800 Subject: Problem svgcoat2 SNF 2008-12-02 20:57:26: wafer stuck Message-ID: wafer got stuck at coat station From piyushv at snf.stanford.edu Tue Dec 2 21:32:42 2008 From: piyushv at snf.stanford.edu (piyushv at snf.stanford.edu) Date: Tue, 2 Dec 2008 21:32:42 -0800 Subject: Comment svgcoat2 SNF 2008-12-02 21:32:42: computer screen stuck Message-ID: From vilanova at snf.stanford.edu Wed Dec 3 07:31:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Dec 2008 07:31:31 -0800 Subject: Comment svgcoat2 SNF 2008-12-02 21:32:42: computer screen stuck Message-ID: some re starter the PC, It looks normal now. From vilanova at snf.stanford.edu Wed Dec 3 07:32:03 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Dec 2008 07:32:03 -0800 Subject: Problem svgcoat2 SNF 2008-12-02 20:57:26: wafer stuck Message-ID: someone removed the wafer and Initialized the PC. From vilanova at snf.stanford.edu Thu Dec 4 07:40:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2008 07:40:11 -0800 Subject: Problem svgcoat2 SNF 2008-11-20 10:51:39: 220-3 bad uniformity Message-ID: Bad Uniformity was due to an extra drop of resist during the EBR dispense , we have adjusted the Suck back , Cycled Wafers with no bad uniformity , Please Report On coral if the dispense & uniformity are not consistent so we can Adjust it A bit more. From mahnaz at snf.stanford.edu Thu Dec 4 17:25:56 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 4 Dec 2008 17:25:56 -0800 Subject: Shutdown svgcoat2 SNF 2008-12-04 17:25:56: belts are coming out Message-ID: I tried adjusting them but it seems that the rotation pin are not align and not rotating so the belt kept coming out. From vilanova at snf.stanford.edu Fri Dec 5 10:02:06 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Dec 2008 10:02:06 -0800 Subject: Shutdown svgcoat2 SNF 2008-12-04 17:25:56: belts are coming out Message-ID: Checked belts and cycled wafers, I could not repeat the problem , please if you see it again report it on coral. From rohank at snf.stanford.edu Fri Dec 5 12:04:30 2008 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Fri, 5 Dec 2008 12:04:30 -0800 Subject: Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck Message-ID: Wafer fallen into the coater. From vilanova at snf.stanford.edu Fri Dec 5 13:49:40 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Dec 2008 13:49:40 -0800 Subject: Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck Message-ID: Removed the dummy wafer from Inside catch cup, , Increase air flow to Arm wafers transfer ( Open and closing when wafer goes into the chuck, tested , cycled 10 wafers ) System ok now, ready to use. From mrlin at snf.stanford.edu Sat Dec 6 02:06:15 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Sat, 6 Dec 2008 02:06:15 -0800 Subject: Problem svgcoat2 SNF 2008-12-06 02:06:14: belt comes off Message-ID: This is in response to problem/shutoff posted on 2008/12/04 17:25. Problem location: When facing the SVG coater (coater module), the belt farther away comes off the "rotors/pulley things". This is most noticeable on the three left wheels. The problem seems to be that the left most wheel is about 1/4" off mount. When looking at the other left most wheel on the other track, the bolt is flush with the wheel. This is not the case on track 2 and causes the belt to shift off the other wheels upon use. The problem does not disable the track; the track is still useable. But it may break soon; or wafers may end up getting stuck in the future. From rohank at snf.stanford.edu Sat Dec 6 15:35:54 2008 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Sat, 6 Dec 2008 15:35:54 -0800 Subject: Comment svgcoat2 SNF 2008-12-06 15:35:54: Track2 resist 1 low alarm Message-ID: When running the 1um 3612 program on Track 2, the system periodically issues the "Track2 resist1" alarm. However, the inspection of the bottle shows that there is plenty of resist left (more than half bottle). From vilanova at snf.stanford.edu Mon Dec 8 08:01:28 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Dec 2008 08:01:28 -0800 Subject: Comment svgcoat2 SNF 2008-12-08 08:01:28: parts on order.......... Message-ID: We are going to place an order to replace belts,spacvers , bearings, pulleys to the coater station # 2 ( we are going to order some extra ones to keep them here in the house,We will replace them as soon as they come in, I know the track is still Good to use, but if you see something else wrong with it please let us know. From mahnaz at snf.stanford.edu Tue Dec 9 09:54:15 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Dec 2008 09:54:15 -0800 Subject: Comment svgcoat2 SNF 2008-12-09 09:54:14: ran 3 um Message-ID: 29698, 30083,29869,29667,29794 2nd wafer, 30361, 30671 From mahnaz at snf.stanford.edu Tue Dec 9 17:43:54 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Dec 2008 17:43:54 -0800 Subject: Problem svgcoat2 SNF 2008-12-09 17:43:54: 220-3 poor spin Message-ID: It seems that wafers are not centered. Ran many dummies and many test wafers.thickness is good. From mahnaz at snf.stanford.edu Fri Dec 12 17:11:13 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 12 Dec 2008 17:11:13 -0800 Subject: Problem svgcoat2 SNF 2008-12-12 17:11:13: 220-3 um Message-ID: Ran many wafers during last two weeks , Mario tried hard to fix the issue but the problem with bad spin still persist. From skoh at snf.stanford.edu Sat Dec 13 22:36:43 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 13 Dec 2008 22:36:43 -0800 Subject: Problem svgcoat2 SNF 2008-12-13 22:36:43: receiver station doesn't go down Message-ID: Doesn't go down when start is pressed. Can't run wafers in auto. From vilanova at snf.stanford.edu Mon Dec 15 08:58:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Dec 2008 08:58:31 -0800 Subject: Problem svgcoat2 SNF 2008-12-13 22:36:43: receiver station doesn't go down Message-ID: receiver station working fine, the resist (3612) Bottle was empty that's why the Indexer wasnt working.... Ok to use,