Problem svgcoat2 SNF 2008-11-20 10:51:39: 220-3 bad uniformity

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Dec 4 07:40:11 PST 2008


Bad Uniformity was due to an extra drop of resist  during the 
EBR dispense , we have adjusted the Suck back , Cycled 
Wafers with no bad uniformity ,  Please  Report On coral if
the dispense & uniformity are not consistent so we can 
Adjust it A bit more. 




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