Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck
rohank at snf.stanford.edu
rohank at snf.stanford.edu
Fri Dec 5 12:04:30 PST 2008
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Shutdown svgcoat2 SNF 2008-12-04 17:25:56: belts are coming out
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Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck
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Wafer fallen into the coater.
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Shutdown svgcoat2 SNF 2008-12-04 17:25:56: belts are coming out
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Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck
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