Problem svgcoat2 SNF 2008-12-05 12:04:29: transfer arm stuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 5 13:49:40 PST 2008


Removed the dummy wafer from Inside catch cup, ,
Increase air flow to Arm  wafers transfer ( Open and closing 
when wafer goes into the chuck, tested , cycled 10 wafers )
System ok now, ready to use. 




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