Problem svgcoat2 SNF 2008-12-06 02:06:14: belt comes off

mrlin at snf.stanford.edu mrlin at snf.stanford.edu
Sat Dec 6 02:06:15 PST 2008


This is in response to problem/shutoff posted on 2008/12/04 17:25.
Problem location: When facing the SVG coater (coater module), the belt farther away comes off the "rotors/pulley things". This is most noticeable on the three left wheels. The problem seems to be that the left most wheel is about 1/4" off mount. When looking at the other left most wheel on the other track, the bolt is flush with the wheel. This is not the case on track 2 and causes the belt to shift off the other wheels upon use. 
The problem does not disable the track; the track is still useable. But it may break soon; or wafers may end up getting stuck in the future.




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