Problem svgcoat2 SNF 2008-02-05 17:31:58: Can't reset system

dtschoen at snf.stanford.edu dtschoen at snf.stanford.edu
Tue Feb 5 17:31:58 PST 2008


I lost a wafer as it was being transported through the vapor prime station.  I retrieved it (it wasn't broken) but now I can't seem to reset the system and run anymore wafers.




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