Problem svgcoat2 SNF 2008-02-18 12:14:00: EBR goes back and forth 2mm and 5mm

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Mon Feb 18 12:14:00 PST 2008


I ran Program 8 on 3 wafers and two of them had 5mm EBR and one of them had 2mm EBR.




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