Problem svgcoat2 SNF 2008-02-18 12:14:00: EBR goes back and forth 2mm and 5mm

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 19 15:19:41 PST 2008


 found the set screw that holds the EBR dispense Nozzle
lose, Adjusted Nozzle position Ran wafers, 2mm back to
normal. 




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