Problem svgcoat2 SNF 2008-02-19 23:54:55: EBR still fluctuates...

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 20 07:22:29 PST 2008


I changed the EBR Program ARM position and now the
EBR is at 2mm All the time ( cycled many wafers) if by
any chance is not stable please report it on coral 
because maybe it's a software problem.
Mv




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