Problem svgcoat2 SNF 2008-02-19 23:54:55: EBR still fluctuates...

vilanova at vilanova at
Wed Feb 20 07:22:29 PST 2008

I changed the EBR Program ARM position and now the
EBR is at 2mm All the time ( cycled many wafers) if by
any chance is not stable please report it on coral 
because maybe it's a software problem.

More information about the svgcoat2-pcs mailing list