Problem svgcoat2 SNF 2008-02-21 13:27:42: EBR Fluctutation

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 22 12:26:42 PST 2008


Checked and repositioned dispense lines and hoses to pivoting dispense arm to minimize friction. Checked and adjusted the D/A drive belt tension. Checked EBR consistancy om many wafers. Looks good. Please continue to report if problem returns. Thanks.




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