Problem svgcoat2 SNF 2008-02-26 02:29:19: Transfer does not work

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Feb 26 07:57:01 PST 2008


reset the track. Noticed that the coater stop button was lit up. If the coater stop button was depressed, the track will stop until the start button is pressed. Cycled 3 dummy wafers with no problem.




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