Shutdown svgcoat2 SNF 2008-02-27 09:14:30: 3micron poor spin
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Wed Feb 27 09:14:31 PST 2008
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Problem svgcoat2 SNF 2008-02-26 02:29:19: Transfer does not work
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Shutdown svgcoat2 SNF 2008-02-27 09:14:30: 3micron poor spin
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working on thick resist problem.
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Problem svgcoat2 SNF 2008-02-26 02:29:19: Transfer does not work
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Shutdown svgcoat2 SNF 2008-02-27 09:14:30: 3micron poor spin
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