Shutdown svgcoat2 SNF 2008-02-29 10:20:54: working on thick resist issue

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 29 12:03:30 PST 2008


Checked and adjusted nozzle centering for dispense #2. Checked and adjusted suckback. Checked and synchronized arm program and dispense pump. Checked thickness- Ave ~ 3.1microns.




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