From gsosa at snf.stanford.edu Thu Jan 3 17:27:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:27:23 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-03 17:27:23: Upgrades in progress Message-ID: still testing recipes with new system controller From mahnaz at snf.stanford.edu Fri Jan 4 16:01:15 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 4 Jan 2008 16:01:15 -0800 Subject: Comment svgcoat2 SNF 2008-01-04 16:01:15: Ran 1and 1.6 um test on shipley Message-ID: readings for 1 um are 10442, 10314, 10360,10403,10389A For 1.6 um are 17248,17223,17311,17201,17378A all within the spec From gsosa at snf.stanford.edu Fri Jan 4 16:15:31 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Jan 2008 16:15:31 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-03 17:27:23: Upgrades in progress Message-ID: Track released for some programs. see coral comments for released programs. From gsosa at snf.stanford.edu Fri Jan 4 16:17:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Jan 2008 16:17:18 -0800 Subject: Comment svgcoat2 SNF 2008-01-04 16:17:18: Track OK for some programs Message-ID: Track is released for some programs. see coral comments for released programs. From shwong at snf.stanford.edu Fri Jan 4 17:29:59 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 4 Jan 2008 17:29:59 -0800 Subject: Problem svgcoat2 SNF 2008-01-04 17:29:58: poor coverge Message-ID: ran 1.6 micron resist no EBR, the coverage seems poor (blotch in teh center of teh wafer) though i ran about 10 dummies. From mahnaz at snf.stanford.edu Mon Jan 7 11:11:26 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 7 Jan 2008 11:11:26 -0800 Subject: Problem svgcoat2 SNF 2008-01-07 11:11:26: vp hot plate needs to be clean Message-ID: lots of resist on it. From gsosa at snf.stanford.edu Wed Jan 9 09:12:48 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Jan 2008 09:12:48 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-09 09:12:48: 3612 poor spin Message-ID: poor spin on 3612 programs. From gsosa at snf.stanford.edu Wed Jan 9 14:06:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Jan 2008 14:06:42 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-09 09:12:48: 3612 poor spin Message-ID: Checked and adjusted suckback. updated arm program timing to sync with dispense pump. From gsosa at snf.stanford.edu Thu Jan 10 07:12:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jan 2008 07:12:23 -0800 Subject: Problem svgcoat2 SNF 2008-01-07 11:11:26: vp hot plate needs to be clean Message-ID: Cleaned hotplate surface From gsosa at snf.stanford.edu Thu Jan 10 07:13:26 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jan 2008 07:13:26 -0800 Subject: Problem svgcoat2 SNF 2008-01-04 17:29:58: poor coverge Message-ID: Adjusted pump suckback and syncronized pump with arm movement. From gsosa at snf.stanford.edu Thu Jan 10 07:15:46 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jan 2008 07:15:46 -0800 Subject: Problem svgcoat2 SNF 2007-11-30 13:10:52: Keypads are not working Message-ID: Reseated dispay board and keyboard connectors. Also system is controlled by new system computer. From gsosa at snf.stanford.edu Thu Jan 10 15:19:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jan 2008 15:19:32 -0800 Subject: Problem svgcoat2 SNF 2007-05-17 09:35:11: Possible HMDS Problem Message-ID: New control system and computer fixed vapor prime issues. From gsosa at snf.stanford.edu Fri Jan 11 11:24:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:24:42 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-11 11:24:41: Working on Recipe manager issues Message-ID: Working on recipe manager issues From uli at snf.stanford.edu Fri Jan 11 14:48:43 2008 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2008 14:48:43 -0800 Subject: Problem svgcoat2 SNF 2008-01-11 14:48:43: 3612 1um resist not uniform Message-ID: and EBR is not 2mm, more 1mm From gsosa at snf.stanford.edu Fri Jan 11 19:45:25 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2008 19:45:25 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-11 11:24:41: Working on Recipe manager issues Message-ID: AIO Corp. installed another computer system so each trach has a computer. Track #1 computer is on the right side and track #2 computer is on the left side. Please continue to report any problems with the new recipe management system. From gsosa at snf.stanford.edu Fri Jan 11 19:46:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2008 19:46:22 -0800 Subject: Problem svgcoat2 SNF 2008-01-11 14:48:43: 3612 1um resist not uniform Message-ID: Worked on 3612 poor spin issues. All looks good now. Checked thickness on 1.0 and 1.6 micron. All OK. From mislam at snf.stanford.edu Wed Jan 16 13:05:30 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 16 Jan 2008 13:05:30 -0800 Subject: Problem svgcoat2 SNF 2008-01-16 13:05:30: computer freeze Message-ID: From vilanova at snf.stanford.edu Wed Jan 16 13:58:07 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jan 2008 13:58:07 -0800 Subject: Problem svgcoat2 SNF 2008-01-16 13:05:30: computer freeze Message-ID: Initialized Computer and cleared. From jparker at snf.stanford.edu Wed Jan 23 17:51:07 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 23 Jan 2008 17:51:07 -0800 Subject: Problem svgcoat2 SNF 2008-01-23 17:51:06: 3um center nonuniformity Message-ID: Center of 3 um (coat prgm 4) about the size of a dime is very non-uniform. From lindaw at snf.stanford.edu Sat Jan 26 11:48:24 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 26 Jan 2008 11:48:24 -0800 Subject: Comment svgcoat2 SNF 2008-01-26 11:48:23: had to reboot computer to reset indexers Message-ID: in program vapor prime only, start button did nothing. exited program and rebooted computer as per Gary's instructions. loaded vapor prime only program again, and this time it starts. From rcordova at snf.stanford.edu Tue Jan 29 10:20:00 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 29 Jan 2008 10:20:00 -0800 Subject: Problem svgcoat2 SNF 2008-01-29 10:19:59: No vapor prime!!! Message-ID: My wafers all lifted. Gary S. to check out system. From gsosa at snf.stanford.edu Tue Jan 29 11:59:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Jan 2008 11:59:33 -0800 Subject: Problem svgcoat2 SNF 2008-01-29 10:19:59: No vapor prime!!! Message-ID: User determined that her substrates were very reflective which required a lower exposure time. No problem with the vapor prime. From king at snf.stanford.edu Tue Jan 29 19:11:43 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 29 Jan 2008 19:11:43 -0800 Subject: Problem svgcoat2 SNF 2008-01-29 19:11:42: PR drips onto the wafer Message-ID: 3612 PR sometimes drips onto the wafer edge. Using 1 um recipe. From mahnaz at snf.stanford.edu Wed Jan 30 14:55:29 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 30 Jan 2008 14:55:29 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-30 14:55:29: EBR leak Message-ID: From gsosa at snf.stanford.edu Wed Jan 30 16:39:17 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jan 2008 16:39:17 -0800 Subject: Comment svgcoat2 SNF 2008-01-30 16:39:16: EBR Leak Message-ID: Track is down due to an EBR leak. We have not fould where the leak is. TRack is still down From gsosa at snf.stanford.edu Thu Jan 31 13:01:10 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jan 2008 13:01:10 -0800 Subject: Shutdown svgcoat2 SNF 2008-01-30 14:55:29: EBR leak Message-ID: Replaced EBR line for bottom EBR. Tested with many wafers. Does not appear to be leaking anymore. From gsosa at snf.stanford.edu Thu Jan 31 13:01:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jan 2008 13:01:42 -0800 Subject: Comment svgcoat2 SNF 2008-01-30 16:39:16: EBR Leak Message-ID: Replaced EBR line for bottom EBR. Tested with many wafers. Does not appear to be leaking anymore. From gsosa at snf.stanford.edu Thu Jan 31 13:02:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jan 2008 13:02:38 -0800 Subject: Problem svgcoat2 SNF 2008-01-29 19:11:42: PR drips onto the wafer Message-ID: Cleaned nozzle and purged dispense line. All OK