Problem svgcoat2 SNF 2008-01-04 17:29:58: poor coverge

shwong at snf.stanford.edu shwong at snf.stanford.edu
Fri Jan 4 17:29:59 PST 2008


ran 1.6 micron resist no EBR, the coverage seems poor (blotch in teh center of teh wafer) though i ran about 10 dummies.




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