Problem svgcoat2 SNF 2008-01-29 19:11:42: PR drips onto the wafer
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Jan 31 13:02:38 PST 2008
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Problem svgcoat2 SNF 2008-01-29 19:11:42: PR drips onto the wafer
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Cleaned nozzle and purged dispense line. All OK
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Problem svgcoat2 SNF 2008-01-29 19:11:42: PR drips onto the wafer
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Shutdown svgcoat2 SNF 2008-01-30 14:55:29: EBR leak
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