From jrjain at snf.stanford.edu Thu Jul 3 00:05:48 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 3 Jul 2008 00:05:48 -0700 Subject: Problem svgcoat2 SNF 2008-07-03 00:05:47: 1um 3612 very nonuniform Message-ID: Wafer center region (~1in radius) has high nonuniformity. Can very clearly see by direct observation (without green light). From gsosa at snf.stanford.edu Thu Jul 3 09:20:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Jul 2008 09:20:18 -0700 Subject: Problem svgcoat2 SNF 2008-07-03 00:05:47: 1um 3612 very nonuniform Message-ID: Cleaned nozzle and purged pump. Tested with several wafers. Coatings look good. From lwchang at snf.stanford.edu Fri Jul 11 13:40:25 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 11 Jul 2008 13:40:25 -0700 Subject: Problem svgcoat2 SNF 2008-07-11 13:40:24: EBR streaks Message-ID: Ran 1um 3612 w/ 2mm EBR. Streaks are very obvious in the EBR region. From vilanova at snf.stanford.edu Fri Jul 11 14:05:37 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jul 2008 14:05:37 -0700 Subject: Problem svgcoat2 SNF 2008-07-11 13:40:24: EBR streaks Message-ID: checked EBR FLow , cycled wafers , EBR Looks FIne, Ok to use. From rcordova at snf.stanford.edu Tue Jul 15 15:48:12 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 15 Jul 2008 15:48:12 -0700 Subject: Problem svgcoat2 SNF 2008-07-15 15:48:12: Wafer lost, and now Message-ID: system will not send wafers through, I tried reloading program and downloading. will not take any wafers at all!!! HELP!!! From vilanova at snf.stanford.edu Wed Jul 16 07:42:46 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jul 2008 07:42:46 -0700 Subject: Problem svgcoat2 SNF 2008-07-15 15:48:12: Wafer lost, and now Message-ID: there was absolutly nothing wrong with the track , I,m cleaning the dummy wafers and track is functioning perfectly fine. ok to use. From jsuarez at snf.stanford.edu Wed Jul 16 10:04:08 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Wed, 16 Jul 2008 10:04:08 -0700 Subject: Problem svgcoat2 SNF 2008-07-16 10:04:07: inconsistent ebr width Message-ID: -was using prog 1um,2mm ebr, no v/p, out of 12 wfs, 4 came out having over 5mm ebr From vilanova at snf.stanford.edu Wed Jul 16 14:03:21 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jul 2008 14:03:21 -0700 Subject: Problem svgcoat2 SNF 2008-07-16 10:04:07: inconsistent ebr width Message-ID: cycled all the dummy wafers ( 10 each ) I could not repeat the problem, we'll keep an eye on it to see if that problem come back. From jjeong1 at snf.stanford.edu Sun Jul 20 07:42:26 2008 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Sun, 20 Jul 2008 07:42:26 -0700 Subject: Problem svgcoat2 SNF 2008-07-20 07:42:25: sender problem Message-ID: sender doesn't send wafers From vilanova at snf.stanford.edu Mon Jul 21 07:40:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Jul 2008 07:40:57 -0700 Subject: Problem svgcoat2 SNF 2008-07-20 07:42:25: sender problem Message-ID: I could not repeat the send Indexer problem , cycled wafers ( cleaned dummy wafers 10 each ) cleaned catch cup, ready to use.- From xhlim at snf.stanford.edu Wed Jul 23 10:28:11 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:28:11 -0700 Subject: Problem svgcoat2 SNF 2008-07-23 10:28:10: Uniformity problem for 1.6 microns 3612 Message-ID: Mario is working on it. From vilanova at snf.stanford.edu Wed Jul 23 10:37:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:37:42 -0700 Subject: Problem svgcoat2 SNF 2008-07-23 10:28:10: Uniformity problem for 1.6 microns 3612 Message-ID: purged line cleaned dispense hose, lubricated dispense arm travel system, cycled wafers , uniformity looks good ready to use. From vilanova at snf.stanford.edu Mon Jul 28 08:51:39 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jul 2008 08:51:39 -0700 Subject: Comment svgcoat2 SNF 2008-07-28 08:51:39: Cleaned catch cup. Message-ID: From jsuarez at snf.stanford.edu Mon Jul 28 09:30:57 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 28 Jul 2008 09:30:57 -0700 Subject: Problem svgcoat2 SNF 2008-07-28 09:30:56: not sending wafer to hotplate Message-ID: From vilanova at snf.stanford.edu Mon Jul 28 09:51:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jul 2008 09:51:44 -0700 Subject: Problem svgcoat2 SNF 2008-07-28 09:30:56: not sending wafer to hotplate Message-ID: reseted system,cycled wafers, ok to use From jsuarez at snf.stanford.edu Mon Jul 28 10:09:35 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 28 Jul 2008 10:09:35 -0700 Subject: Problem svgcoat2 SNF 2008-07-28 10:09:34: belt to receiver cassette not moving Message-ID: not sending wafer to receiver cassette From vilanova at snf.stanford.edu Mon Jul 28 10:56:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jul 2008 10:56:45 -0700 Subject: Problem svgcoat2 SNF 2008-07-28 10:09:34: belt to receiver cassette not moving Message-ID: re initialized system , cycled 23 wafers , system ok now. ok to use