Problem svgcoat2 SNF 2008-07-03 00:05:47: 1um 3612 very nonuniform

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Jul 3 00:05:48 PDT 2008


Wafer center region (~1in radius) has high nonuniformity.  Can very clearly see by direct observation (without green light).




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