Problem svgcoat2 SNF 2008-07-23 10:28:10: Uniformity problem for 1.6 microns 3612

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jul 23 10:37:42 PDT 2008


purged line cleaned dispense hose, lubricated dispense
arm travel system, cycled wafers , uniformity looks good
ready to use. 




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