From gsosa at snf.stanford.edu  Thu Jun  5 08:16:50 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 5 Jun 2008 08:16:50 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-05 08:16:49: System tests
Message-ID: <mailman.362.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

System testing in progress



From gsosa at snf.stanford.edu  Thu Jun  5 10:58:25 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 5 Jun 2008 10:58:25 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-05 08:16:49: System tests
Message-ID: <mailman.363.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

System tested OK.



From mahnaz at snf.stanford.edu  Tue Jun 10 11:23:33 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 10 Jun 2008 11:23:33 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-10 11:23:28: big resist leak
Message-ID: <mailman.364.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

not sure which track is doing it.



From gsosa at snf.stanford.edu  Tue Jun 10 11:52:31 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 10 Jun 2008 11:52:31 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-10 11:23:28: big resist leak
Message-ID: <mailman.365.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

Problem was on track 1. Track 2 OK.



From rcordova at snf.stanford.edu  Tue Jun 10 15:07:22 2008
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Tue, 10 Jun 2008 15:07:22 -0700
Subject: Problem svgcoat2 SNF 2008-06-10 15:07:21: Dribbling resist on wafers after dispense
Message-ID: <mailman.366.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

Poor suckback  on track 2



From gsosa at snf.stanford.edu  Wed Jun 11 09:30:19 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 11 Jun 2008 09:30:19 -0700
Subject: Problem svgcoat2 SNF 2008-06-10 15:07:21: Dribbling resist on wafers after dispense
Message-ID: <mailman.367.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

3612 resist bottle replaced and purged yesterday afternoon. Replaced the spin bowl. Refilled EBR canisters. Tested operation. All OK



From ykuo at snf.stanford.edu  Wed Jun 11 13:48:11 2008
From: ykuo at snf.stanford.edu (ykuo at snf.stanford.edu)
Date: Wed, 11 Jun 2008 13:48:11 -0700
Subject: Comment svgcoat2 SNF 2008-06-11 13:48:10: wafer left on coater
Message-ID: <mailman.368.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

Previous user left wafer in the coater (still vaccum held). I have to reset the coat to remove it.



From calarrudo at snf.stanford.edu  Mon Jun 16 15:39:31 2008
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Mon, 16 Jun 2008 15:39:31 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-16 15:39:31: 
Message-ID: <mailman.369.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

Problem with the track spraying EBR to the side not on wafer.



From vilanova at snf.stanford.edu  Tue Jun 17 09:54:00 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 17 Jun 2008 09:54:00 -0700
Subject: Comment svgcoat2 SNF 2008-06-11 13:48:10: wafer left on coater
Message-ID: <mailman.370.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

removed wafer, , system working fine. 



From vilanova at snf.stanford.edu  Tue Jun 17 09:54:42 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 17 Jun 2008 09:54:42 -0700
Subject: Shutdown svgcoat2 SNF 2008-06-16 15:39:31: 
Message-ID: <mailman.371.1356283432.4703.svgcoat2-pcs@snf.stanford.edu>

Adjusteed EBR Nozzle,. cycled wafers , ok to use.