Problem svgcoat2 SNF 2008-06-10 15:07:21: Dribbling resist on wafers after dispense

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 11 09:30:19 PDT 2008


3612 resist bottle replaced and purged yesterday afternoon. Replaced the spin bowl. Refilled EBR canisters. Tested operation. All OK




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