Shutdown svgcoat2 SNF 2008-06-16 15:39:31:
calarrudo at snf.stanford.edu
calarrudo at snf.stanford.edu
Mon Jun 16 15:39:31 PDT 2008
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Comment svgcoat2 SNF 2008-06-11 13:48:10: wafer left on coater
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Shutdown svgcoat2 SNF 2008-06-16 15:39:31:
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Problem with the track spraying EBR to the side not on wafer.
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Comment svgcoat2 SNF 2008-06-11 13:48:10: wafer left on coater
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Shutdown svgcoat2 SNF 2008-06-16 15:39:31:
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