From mahnaz at snf.stanford.edu Thu Mar 6 14:52:58 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 Mar 2008 14:52:58 -0800 Subject: Problem svgcoat2 SNF 2008-03-06 14:52:57: almost broke a wafer Message-ID: seems that sensors are not in tune at all. I am writing from Cheng's behalf. From mtang at snf.stanford.edu Fri Mar 7 09:24:03 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:24:03 -0800 Subject: Problem svgcoat2 SNF 2008-03-06 14:52:57: almost broke a wafer Message-ID: Not sure what happened. Reset track and it works fine now. From gsosa at snf.stanford.edu Fri Mar 7 16:04:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:04:27 -0800 Subject: Comment svgcoat2 SNF 2008-03-07 16:04:23: Broken wafer in cup Message-ID: Users wafer broke in process cup. it was a substrate mounted to a silicon wafer. The wafer was not balanced or centered and released from the chuck. Replaced the cup with a clean cup Assy. Tested track operation. All OK. From gsosa at snf.stanford.edu Mon Mar 10 10:22:11 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Mar 2008 10:22:11 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-10 10:22:11: Software Upgrade Message-ID: From gsosa at snf.stanford.edu Mon Mar 10 16:25:05 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Mar 2008 16:25:05 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-10 10:22:11: Software Upgrade Message-ID: Vendor completed software upgrades for now. From vilanova at snf.stanford.edu Tue Mar 11 14:14:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Mar 2008 14:14:20 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-11 14:14:20: working On defective ( send ) Indexer Message-ID: From gsosa at snf.stanford.edu Tue Mar 11 14:42:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 14:42:23 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-11 14:14:20: working On defective ( send ) Indexer Message-ID: Troubleshot and replaced blown fuse on power distribution box. From gsosa at snf.stanford.edu Tue Mar 11 15:56:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Mar 2008 15:56:55 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-11 15:56:55: EBR Leak Message-ID: EBR leak. From gsosa at snf.stanford.edu Wed Mar 12 11:03:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 Mar 2008 11:03:12 -0700 Subject: Shutdown svgcoat2 SNF 2008-03-11 15:56:55: EBR Leak Message-ID: Replaced the catch cup. Repaired hose fitting on EBR supply tube(Backside EBR). Tested track operation. No EBR leaks. System OK to use. From huangzb at snf.stanford.edu Sat Mar 22 17:37:58 2008 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 22 Mar 2008 17:37:58 -0700 Subject: Problem svgcoat2 SNF 2008-03-22 17:37:57: wafer stuck at the hot bake several times Message-ID: From zhangdw at snf.stanford.edu Sun Mar 23 17:38:00 2008 From: zhangdw at snf.stanford.edu (zhangdw at snf.stanford.edu) Date: Sun, 23 Mar 2008 17:38:00 -0700 Subject: Problem svgcoat2 SNF 2008-03-23 17:38:00: dummy wafer stuck on the hot plate Message-ID: during the process of coating, it's stuck on the hot plate and can't take it off even under manual mode or restart the power From vilanova at snf.stanford.edu Mon Mar 24 07:27:36 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:27:36 -0700 Subject: Problem svgcoat2 SNF 2008-03-22 17:37:57: wafer stuck at the hot bake several times Message-ID: User ran a wafer coated on both sides, please make sure the wafers ( Dummy wafers ) dont have any resist on the back side before you use them. From vilanova at snf.stanford.edu Mon Mar 24 07:27:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:27:44 -0700 Subject: Problem svgcoat2 SNF 2008-03-23 17:38:00: dummy wafer stuck on the hot plate Message-ID: User ran a wafer coated on both sides, please make sure the wafers ( Dummy wafers ) dont have any resist on the back side before you use them. From jsuarez at snf.stanford.edu Mon Mar 24 10:28:45 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 24 Mar 2008 10:28:45 -0700 Subject: Problem svgcoat2 SNF 2008-03-24 10:28:44: poor spin disp 1 Message-ID: bubble in line causing intemittent poor spin, also recipe for 5mm ebr doing 2mm ebr From vilanova at snf.stanford.edu Mon Mar 24 15:14:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Mar 2008 15:14:29 -0700 Subject: Problem svgcoat2 SNF 2008-03-24 10:28:44: poor spin disp 1 Message-ID: We 've Purged Line, Cleaned NOzzle ,Adjusted Arm position Program, NOticed 2 dispense hoses were touching the side of the dispense arm , making the arm unstable ran ( 15 wafers ) All look Good. M V/MM From wwang at snf.stanford.edu Wed Mar 26 05:25:29 2008 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 26 Mar 2008 05:25:29 -0700 Subject: Problem svgcoat2 SNF 2008-03-26 05:25:28: svg 3612 resist box empty Message-ID: From vilanova at snf.stanford.edu Wed Mar 26 07:17:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Mar 2008 07:17:12 -0700 Subject: Problem svgcoat2 SNF 2008-03-26 05:25:28: svg 3612 resist box empty Message-ID: replaced empty resist bottle, purged line, ready to use. I 've aLSO labeled a resist 3612 bottle for manual dispense only for manual dispense users. is located in the yellow cabinet next to the new resist bottles .