Comment svgcoat2 SNF 2008-03-07 16:04:23: Broken wafer in cup

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 7 16:04:27 PST 2008


Users wafer broke in process cup. it was a substrate mounted to a silicon wafer. The wafer was not balanced or centered and released from the chuck. Replaced the cup with a clean cup Assy. Tested track operation. All OK.




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