Problem svgcoat2 SNF 2008-03-23 17:38:00: dummy wafer stuck on the hot plate

zhangdw at snf.stanford.edu zhangdw at snf.stanford.edu
Sun Mar 23 17:38:00 PDT 2008


during the process of coating, it's stuck on the hot plate and can't take it off even under manual mode or restart the power




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