Problem svgcoat2 SNF 2008-03-22 17:37:57: wafer stuck at the hot bake several times

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 24 07:27:36 PDT 2008


User ran a wafer coated on both sides, please make sure
the wafers  ( Dummy wafers ) dont have any resist on the
back side before you use them. 




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