From lindaw at snf.stanford.edu Mon May 5 16:10:40 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 5 May 2008 16:10:40 -0700 Subject: Comment svgcoat2 SNF 2008-05-05 16:10:40: hot plate drive belt running very slow Message-ID: the hot plate drive belt seems to be running much more slowly than usual. From vilanova at snf.stanford.edu Tue May 6 10:16:19 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 May 2008 10:16:19 -0700 Subject: Comment svgcoat2 SNF 2008-05-05 16:10:40: hot plate drive belt running very slow Message-ID: the belts are running slower to give time to the next sensor to get activated. From sjo at snf.stanford.edu Tue May 13 16:37:33 2008 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Tue, 13 May 2008 16:37:33 -0700 Subject: Problem svgcoat2 SNF 2008-05-13 16:37:33: Sender station stuck Message-ID: On the second wafer to be processed the sender station triggered an alarm and stopped working. From vilanova at snf.stanford.edu Wed May 14 08:26:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 May 2008 08:26:57 -0700 Subject: Problem svgcoat2 SNF 2008-05-13 16:37:33: Sender station stuck Message-ID: sender station wasnt working because nobody took the time to check and empty the small carboy ( waste container under the coater ) when the carboy is full the system stops! and dont let you you anything!!!!! we just empty the carboy cycled 24 wafers and everything looks fine, please check everything before you use the system, just like staff showed you in your training class!!!!!!!!!!!!!!!!! From mrlin at snf.stanford.edu Thu May 15 13:53:52 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 15 May 2008 13:53:52 -0700 Subject: Problem svgcoat2 SNF 2008-05-15 13:53:52: alarming Message-ID: frequerntly alarms and says "spindle on top?" for no reason. but it still ok/working. From vilanova at snf.stanford.edu Fri May 16 10:52:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 May 2008 10:52:41 -0700 Subject: Problem svgcoat2 SNF 2008-05-15 13:53:52: alarming Message-ID: Adjusted Spindle UP/DOWN position sensor cycled wafers , no more alamrs, ok to use From jtsai at snf.stanford.edu Thu May 22 01:31:22 2008 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Thu, 22 May 2008 01:31:22 -0700 Subject: Comment svgcoat2 SNF 2008-05-22 01:31:21: resist2 needs prime Message-ID: resist2 was, the bottle was changed, but the line was not primed. From vilanova at snf.stanford.edu Thu May 22 07:29:09 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 May 2008 07:29:09 -0700 Subject: Comment svgcoat2 SNF 2008-05-22 01:31:21: resist2 needs prime Message-ID: Purged line, tested system , ready to use. From tura at snf.stanford.edu Sat May 24 18:58:40 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sat, 24 May 2008 18:58:40 -0700 Subject: Comment svgcoat2 SNF 2008-05-24 18:58:39: Dripping PR Message-ID: For the 1um 3612 program with EBR, the tip starts dripping photoresist as it is approaching the wafer. It is obvious from the photoresist under the path of the tip. It seems not to cause very significant non-uniformities on the wafer. From gsosa at snf.stanford.edu Sun May 25 11:18:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 May 2008 11:18:33 -0700 Subject: Comment svgcoat2 SNF 2008-05-24 18:58:39: Dripping PR Message-ID: Adjusted dispense arm up/down speed and purged resist line. Also cleaned nozzle tips. Tested with dummy wafers- All OK.