Shutdown svgcoat2 SNF 2008-11-19 09:59:10: Spindle problem

gsosa at gsosa at
Wed Nov 19 13:55:01 PST 2008

Spin motor failing at low rpm's. Replaced spindle motor. Checked and set up wafer centering. Installed clean process bowl. Tested track operation with dummy program. All OK.

More information about the svgcoat2-pcs mailing list