Shutdown svgcoat2 SNF 2008-11-19 09:59:10: Spindle problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Nov 19 13:55:01 PST 2008


Spin motor failing at low rpm's. Replaced spindle motor. Checked and set up wafer centering. Installed clean process bowl. Tested track operation with dummy program. All OK.




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