Problem svgcoat2 SNF 2008-11-20 10:51:39: 220-3 bad uniformity

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Nov 20 10:51:43 PST 2008


cleaned the nozzel, ran 6 dummies.
only ran 4 wafers, all bad with nonuniformity , some bad spin boat. one wafer lots of resist in a strange pattern in the center.
Gary saw them too.




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