Problem svgcoat2 SNF 2008-11-20 13:37:28: wafer not spining after resist dispense

gsosa at gsosa at
Fri Nov 21 15:11:06 PST 2008

Replaced spindle motor. Changed out track interface PCB as per tech support. Will continue to monitor motor performance. Checked and adjusted wafer centering. Tested all track functions by cycleing with dry run program. Checked 1.0 micron 3612 program- Mean thickness 10275 Angstroms. Std Dev 11 Angstroms(5 points).  Cleaned coater bowl.

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