Comment svgcoat2 SNF 2008-11-27 11:01:50: wafer "unstuck"

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Nov 27 11:01:50 PST 2008


The wafer was on the spin chuck, but the feed belt rails were not open all the way,  I gently pulled them open, and the wafer went through the spin cycle.The computer still seems to be frozen. Possibly due to being in shut down mode?




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