From calarrudo at snf.stanford.edu Thu Oct 2 18:17:05 2008 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 2 Oct 2008 18:17:05 -0700 Subject: Problem svgcoat2 SNF 2008-10-02 18:17:04: Coater track 2 Message-ID: Coater program 7, ,step 4 spin speed chanhed from 5.50 to 3.10. I am not authorized to make correction. From gsosa at snf.stanford.edu Fri Oct 3 09:22:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 3 Oct 2008 09:22:45 -0700 Subject: Comment svgcoat2 SNF 2008-10-03 09:22:44: 1.0 um thickness test Message-ID: Checked 1.0 micron 3612 thickness. Looks good- C: 10175, L:10173, R: 10088, T: 10125, B: 10174. Spin quality and EBR look good From gsosa at snf.stanford.edu Fri Oct 3 09:25:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 3 Oct 2008 09:25:12 -0700 Subject: Problem svgcoat2 SNF 2008-10-02 18:17:04: Coater track 2 Message-ID: Checked all program 7 recipes against the orange recipe sheets. All step 4's are correct . Tested thickness with "7 1.0um wo/VP 2mm EBR" program. Thickness right on. From gsosa at snf.stanford.edu Fri Oct 3 09:26:03 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 3 Oct 2008 09:26:03 -0700 Subject: Problem svgcoat2 SNF 2008-09-10 11:48:55: run prog7 2mm EBR the last one of five wafers got 5mm EBR Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Oct 3 09:28:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 3 Oct 2008 09:28:06 -0700 Subject: Problem svgcoat2 SNF 2008-09-30 09:39:16: poor spin prog 7, 2 mm ebr Message-ID: Tested 1.0 um 3612 recipe. All lools good. Checked 1.0 um thickness- Tox looks good. From faridz at snf.stanford.edu Mon Oct 6 10:36:54 2008 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 6 Oct 2008 10:36:54 -0700 Subject: Problem svgcoat2 SNF 2008-10-06 10:36:53: display froze Message-ID: svg 02 pannel screen froze , cant operate the tool. From vilanova at snf.stanford.edu Mon Oct 6 10:56:39 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Oct 2008 10:56:39 -0700 Subject: Problem svgcoat2 SNF 2008-10-06 10:36:53: display froze Message-ID: fixed From jparker at snf.stanford.edu Tue Oct 7 12:04:10 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 7 Oct 2008 12:04:10 -0700 Subject: Comment svgcoat2 SNF 2008-10-07 12:04:09: 10/7 uniformity test Message-ID: 1 um / 3612: Uniformity good Ave: 10366 Ang / Std dev: 18 Ang (Top: 10370A / Center: 10346 A / Flat: 10358A / Left: 10394A / Right: 10360A) *** 1.6 um / 3612: uniformity good Average: 17134 Ang / Std dev: 13 Ang (Top: 17139A / Center: 17146A / Flat: 17119A / Left: 17146A / Right: 17122A) From jparker at snf.stanford.edu Tue Oct 7 12:19:39 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 7 Oct 2008 12:19:39 -0700 Subject: Comment svgcoat2 SNF 2008-10-07 12:19:38: 10/7 3um uniformity test Message-ID: 3 um / 220-3: Mediocre uniformity (4 dummies run first). Ave: 30241 Ang / Std dev: 182 Ang. (Top:30275A / Center:30015A / Flat: 30196A / Left:30201A / Right:30519A) From king at snf.stanford.edu Tue Oct 7 21:07:46 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 7 Oct 2008 21:07:46 -0700 Subject: Problem svgcoat2 SNF 2008-10-07 21:07:46: software problem Message-ID: seems to be locked up in an odd mode. From king at snf.stanford.edu Tue Oct 7 21:10:41 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 7 Oct 2008 21:10:41 -0700 Subject: Problem svgcoat2 SNF 2008-10-07 21:10:41: incomplete EBR Message-ID: Yesterday the 5mm EBR with 3612 left lots of PR streaks, so wafers needed to be touched up manually. From gsosa at snf.stanford.edu Wed Oct 8 09:58:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 09:58:34 -0700 Subject: Problem svgcoat2 SNF 2008-10-07 21:07:46: software problem Message-ID: The computer was locked up. Cycled power on the computer . testedoperation. All OK. From gsosa at snf.stanford.edu Wed Oct 8 09:59:43 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 09:59:43 -0700 Subject: Problem svgcoat2 SNF 2008-10-07 21:10:41: incomplete EBR Message-ID: Optimized the arm program for 5mm EBR program. tested on 1.0 and 1.6 thickness programs. do not see the small fingers amymore. From rcordova at snf.stanford.edu Thu Oct 9 09:03:09 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 9 Oct 2008 09:03:09 -0700 Subject: Problem svgcoat2 SNF 2008-10-09 09:03:08: 3612 resist not dispensing at center Message-ID: runnning dummies, center of wafer has a hole. No resist From gsosa at snf.stanford.edu Thu Oct 9 10:02:10 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Oct 2008 10:02:10 -0700 Subject: Problem svgcoat2 SNF 2008-10-09 09:03:08: 3612 resist not dispensing at center Message-ID: Purged dispense line and cleaned nozzle tip. From ssafi at snf.stanford.edu Fri Oct 10 18:38:28 2008 From: ssafi at snf.stanford.edu (ssafi at snf.stanford.edu) Date: Fri, 10 Oct 2008 18:38:28 -0700 Subject: Problem svgcoat2 SNF 2008-10-10 18:38:27: transfer to receiver cassette Message-ID: the track wheels are spinning without any wafer present and the interface doesn`t reset, maybe sensor need repair? From vilanova at snf.stanford.edu Mon Oct 13 07:50:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Oct 2008 07:50:35 -0700 Subject: Problem svgcoat2 SNF 2008-10-10 18:38:27: transfer to receiver cassette Message-ID: couldnt duplicate the problem, receiver indexer working fine, cycled wafers, ok to use. From huigensr at snf.stanford.edu Thu Oct 16 12:50:18 2008 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Thu, 16 Oct 2008 12:50:18 -0700 Subject: Shutdown svgcoat2 SNF 2008-10-16 12:50:14: Receiving station won't index Message-ID: Fails to index receiver...program errors. Attempted index reset through software and control panel. Tried power off and powered back on, but problem persisted. From vilanova at snf.stanford.edu Thu Oct 16 13:02:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Oct 2008 13:02:05 -0700 Subject: Shutdown svgcoat2 SNF 2008-10-16 12:50:14: Receiving station won't index Message-ID: both of the small waste Container were full therefore the system didnt want to start , Emptied both container , checked and tested system, good to use. From ryw at snf.stanford.edu Fri Oct 17 17:26:06 2008 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 17 Oct 2008 17:26:06 -0700 Subject: Comment svgcoat2 SNF 2008-10-17 17:26:05: downstram not ready Message-ID: downstram not ready, cannot solve the problem From bilee at snf.stanford.edu Mon Oct 20 00:56:00 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Mon, 20 Oct 2008 00:56:00 -0700 Subject: Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO Message-ID: RESET does not work. Cannot remove the wafer. From vilanova at snf.stanford.edu Mon Oct 20 07:41:40 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Oct 2008 07:41:40 -0700 Subject: Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO Message-ID: removed wafer from hotplate station Cleaned chuck and hotplates ( they were full of resist) PLEASE MAKE SURE THE DUMMY WAFER DOESNT HAVE ANY RESIST ON THE BOTTOM , IF THEY DO DONT USE THEM AND THROW THEM AWAY WHEN THE SYSTEM SHOWS " UPSTREAM NOT READY" ALL YOU GOT TO DO IS PRESS THE CLEAR BUTTON THIS WILL NOT AFFECT YOUR PROCESS I hope the infomation written here helps so we dont see this problem anymore. From huigensr at snf.stanford.edu Tue Oct 21 10:23:30 2008 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Tue, 21 Oct 2008 10:23:30 -0700 Subject: Problem svgcoat2 SNF 2008-10-21 10:23:30: Receiver Station Reset Problem Message-ID: Receiver station will not reset...causes system to error on collection downstream. Receiver casset was eventually swaped out and finally the system responded...but is unpredictable. From vilanova at snf.stanford.edu Tue Oct 21 10:38:43 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Oct 2008 10:38:43 -0700 Subject: Problem svgcoat2 SNF 2008-10-21 10:23:30: Receiver Station Reset Problem Message-ID: the receiver Indexer wasnt working because the bottom of the Cassette that was in use was not aligned, Adjusted cassette and tested, ready to use. From vilanova at snf.stanford.edu Tue Oct 21 10:39:25 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Oct 2008 10:39:25 -0700 Subject: Comment svgcoat2 SNF 2008-10-17 17:26:05: downstram not ready Message-ID: press clear on the Main Pad and that will solve the problem, that will take you to the Program screen. From rcordova at snf.stanford.edu Fri Oct 24 13:23:38 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 24 Oct 2008 13:23:38 -0700 Subject: Problem svgcoat2 SNF 2008-10-24 13:23:38: Very fine mist on all my wafers Message-ID: spun up 25 wafers with 3612 1um resist just before lunch, all of them have a fine mist on the surface (looks like poor exhaust) but the meter on the wall says it is ok) Gary Sosa checing it out! From gsosa at snf.stanford.edu Fri Oct 24 15:20:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Oct 2008 15:20:42 -0700 Subject: Problem svgcoat2 SNF 2008-10-24 13:23:38: Very fine mist on all my wafers Message-ID: Inspected and found a broken wafer in the process bowl. I suspect that the very large piece was deflecting EBR back onto the wafer. The very large piece could have also altered the exhaust dynamics of the process bowl causing the poor spin. This is not the 1st time that we have found broken wafers in the process bowl with NO problem or comment reported in coral. In this case, a user will have to rework many wafers because of this. Please report broken wafers in the process bowl so that maintenance can address the problem and clean up as needed. The quality of your work and other users work depends on it. From rcordova at snf.stanford.edu Sat Oct 25 14:55:23 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 25 Oct 2008 14:55:23 -0700 Subject: Problem svgcoat2 SNF 2008-10-25 14:55:22: Poor spin and very heavy mist, same as yesterda! Message-ID: All the work that Gary did, does not seem to improve the resist dispense for 3612 1 micron resist. Very bad striations and tinydots from ehausted fumes landing back on the wafer. Cannot use!! RCordova From rohank at snf.stanford.edu Sat Oct 25 15:29:50 2008 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Sat, 25 Oct 2008 15:29:50 -0700 Subject: Comment svgcoat2 SNF 2008-10-25 15:29:49: SVGCOAT track 2 Message-ID: Track 1 is dead. But On track 2, I ran 1um 3612 on 3 dummies + 1 test + 1 real wafer after. All came out nice and clean. From mtan at snf.stanford.edu Sat Oct 25 18:25:48 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 25 Oct 2008 18:25:48 -0700 Subject: Problem svgcoat2 SNF 2008-10-25 18:25:47: wafer broke during spinning Message-ID: I picked up the larger pieces, but there are some small pieces at the bottom of the pit that is beyond my reach. From vilanova at snf.stanford.edu Mon Oct 27 09:15:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Oct 2008 09:15:24 -0700 Subject: Problem svgcoat2 SNF 2008-10-25 14:55:22: Poor spin and very heavy mist, same as yesterda! Message-ID: cleaned catch cup hmds hotplate and post bake plate also Cleaned exhaust system , replaced resist bottle and purged line, cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Oct 27 09:17:06 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Oct 2008 09:17:06 -0700 Subject: Problem svgcoat2 SNF 2008-10-25 18:25:47: wafer broke during spinning Message-ID: please read previous message. From vilanova at snf.stanford.edu Mon Oct 27 09:17:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Oct 2008 09:17:14 -0700 Subject: Comment svgcoat2 SNF 2008-10-25 15:29:49: SVGCOAT track 2 Message-ID: please read previous message. From king at snf.stanford.edu Thu Oct 30 00:37:36 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 30 Oct 2008 00:37:36 -0700 Subject: Problem svgcoat2 SNF 2008-10-30 00:37:34: Incomplete EBR Message-ID: Residual PR streaks. From gsosa at snf.stanford.edu Thu Oct 30 09:20:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 09:20:23 -0700 Subject: Shutdown svgcoat2 SNF 2008-10-30 09:20:22: EBR Issues Message-ID: Will raplace and adjust height of EBR nozzle. From gsosa at snf.stanford.edu Thu Oct 30 20:29:40 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 20:29:40 -0700 Subject: Shutdown svgcoat2 SNF 2008-10-30 09:20:22: EBR Issues Message-ID: Installed and set up new EBR nozzle. Could not get good results with many diferent setups. Lots of EBR splashback. Re-installed and set up original nozzle. Adjusted height, angle and flow. Checked and updated all arm programs for 2 and 5 mm EBR widths. From gsosa at snf.stanford.edu Thu Oct 30 20:29:54 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 20:29:54 -0700 Subject: Problem svgcoat2 SNF 2008-10-30 00:37:34: Incomplete EBR Message-ID: Installed and set up new EBR nozzle. Could not get good results with many diferent setups. Lots of EBR splashback. Re-installed and set up original nozzle. Adjusted height, angle and flow. Checked and updated all arm programs for 2 and 5 mm EBR widths.